Among the CMM calibration techniques, the calibration with standard specimen is most accurate way to acquire the required precision. When there is no standard specimen, the calibration of CMM with itself is possible. This calibration method is called "self-calibration". In this paper, we developed self-calibration algorithm for CMM XY plane. It is possible to calculate the in-plane error and out-of-plane error of CMM with 3 different measurement of same artifact. Experimental result shows that the non-orthogonality error is dominant in in-plane error and the self-calibration result and laser interferometer measured result have almost same value.ame value.