Monolithic integration of 3-D electroplated microstructures with unlimited number of levels using planarization with a sacrificial metallic mold (PSMM)

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Issue Date
1999-01-17
Language
ENG
Citation

Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, pp.624 - 629

URI
http://hdl.handle.net/10203/125755
Appears in Collection
EE-Conference Papers(학술회의논문)
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