3-D lithography and metal surface micromachining for RF and microwave MEMS

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Issue Date
2002-01-20
Language
ENG
Citation

15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, pp.673 - 676

URI
http://hdl.handle.net/10203/125452
Appears in Collection
EE-Conference Papers(학술회의논문)RIMS Conference Papers
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