2종모드 레이저를 이용한 고분해능 헤테로다인 간섭계A High-Resolution Heterodyne Interferometer using Beat Frequency between Two-Axial Modes of a HeNe Laser

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Publisher
한국정밀공학회
Issue Date
2001
Language
KOR
Citation

한국정밀공학회 2001년도 추계학술대회 , v.1, pp.214 - 219

URI
http://hdl.handle.net/10203/125448
Appears in Collection
ME-Conference Papers(학술회의논문)
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