ECR PECVD법으로 증착한 PZT 커패시터의 전극이 미치는 영향

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Issue Date
2000-05-01
Language
KOR
Citation

한국재료학회 춘계학술발표대회, pp.0 - 0

URI
http://hdl.handle.net/10203/125332
Appears in Collection
MS-Conference Papers(학술회의논문)
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