극소형 공진가속도계의 설계, 제작 및 정적시험

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Issue Date
1997-04-26
Language
KOR
Citation

대한전기학회 MEMS연구회 학술발표회, pp.321 - 330

URI
http://hdl.handle.net/10203/124391
Appears in Collection
BiS-Conference Papers(학술회의논문)
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