Novel and High-Yield Fabrication of Electroplated 3D Micro-Coils for MEMS and Microelectronics
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yoon, Jun-Bo | ko |
| dc.contributor.author | Han, Chul-Hi | ko |
| dc.contributor.author | Yoon, Euisik | ko |
| dc.contributor.author | Kim, Choong Ki | ko |
| dc.date.accessioned | 2013-03-15T20:28:35Z | - |
| dc.date.available | 2013-03-15T20:28:35Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-09-21 | - |
| dc.identifier.citation | Micromachining and Microfabrication Process Technology IV, pp.233 - 240 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/123563 | - |
| dc.language | English | - |
| dc.publisher | Micromachining and Microfabrication Process Technology IV | - |
| dc.title | Novel and High-Yield Fabrication of Electroplated 3D Micro-Coils for MEMS and Microelectronics | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000076937000026 | - |
| dc.identifier.scopusid | 2-s2.0-0005066059 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 233 | - |
| dc.citation.endingpage | 240 | - |
| dc.citation.publicationname | Micromachining and Microfabrication Process Technology IV | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Santa Clara, CA | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.localauthor | Han, Chul-Hi | - |
| dc.contributor.localauthor | Yoon, Euisik | - |
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