Novel and High-Yield Fabrication of Electroplated 3D Micro-Coils for MEMS and Microelectronics

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 196
  • Download : 0
Publisher
Micromachining and Microfabrication Process Technology IV
Issue Date
1998-09-21
Language
ENG
Citation

Micromachining and Microfabrication Process Technology IV, v.3511, pp.233 - 240

URI
http://hdl.handle.net/10203/123563
Appears in Collection
EE-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0