(100) Si 기판위에 증착된 TiSi2 박막의 응집

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Publisher
대한금속재료학회
Issue Date
1997
Language
KOR
Citation

대한금속재료학회 춘계학술발표대회, pp.150 - 151

URI
http://hdl.handle.net/10203/123291
Appears in Collection
MS-Conference Papers(학술회의논문)
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