Zero-Dimensional Modeling of an Ar/CHF3/CF4 Gas Discharge in an Inductively Coupled Plasma Device
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 장충석 | - |
| dc.date.accessioned | 2013-03-15T16:13:51Z | - |
| dc.date.available | 2013-03-15T16:13:51Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997 | - |
| dc.identifier.citation | Bull, Kor. Phys. Soc., v., no., pp.140 - 140 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/121143 | - |
| dc.language | KOR | - |
| dc.title | Zero-Dimensional Modeling of an Ar/CHF3/CF4 Gas Discharge in an Inductively Coupled Plasma Device | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 140 | - |
| dc.citation.endingpage | 140 | - |
| dc.citation.publicationname | Bull, Kor. Phys. Soc. | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 장충석 | - |
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