Design, Fabrication and Uncertainty Evaluation of a Surface-micromachined Capacitive Microaccelerometer

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Issue Date
1998-11-15
Language
ENG
Citation

Inter. Mechanical Engineering Congress and Exposition (IMECE '98), ASME, pp.347 - 352

URI
http://hdl.handle.net/10203/120697
Appears in Collection
BiS-Conference Papers(학술회의논문)
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