미소기계구조물의 전기적 공진주파수 조정을 위한 삼각형배열의 빗살구조물

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Issue Date
1997-04-01
Language
KOR
Citation

대한전기학회 MEMS연구회 학술발표회, pp.83 - 90

URI
http://hdl.handle.net/10203/120670
Appears in Collection
BiS-Conference Papers(학술회의논문)
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