비등간격 수평감지 전극구조의 정전용량형 다결정 실리콘 가속도계

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Issue Date
1998-04-11
Language
KOR
Citation

대한전기학회 MEMS연구회 학술 발표회, pp.149 - 154

URI
http://hdl.handle.net/10203/120652
Appears in Collection
BiS-Conference Papers(학술회의논문)
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