A low-voltage actuated micromachined microwave switch using torsion springs and leverage

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In this paper, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is similar to5 V. The insertion loss of similar to1 dB and the isolation as high as similar to 40 dB at 1 GHz are achieved by the push-pull operation.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2000-12
Language
ENG
Article Type
Article; Proceedings Paper
Keywords

MEMS SWITCHES

Citation

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, v.48, no.12, pp.2540 - 2545

ISSN
0018-9480
URI
http://hdl.handle.net/10203/1206
Appears in Collection
EE-Journal Papers(저널논문)
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