DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lim Jong-Tae | - |
dc.contributor.author | Cho, Kwang-Hyun | - |
dc.date.accessioned | 2013-03-15T10:13:21Z | - |
dc.date.available | 2013-03-15T10:13:21Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998-03 | - |
dc.identifier.citation | 제어계측, 로보틱스 및 자동화 연구회 합동 학술 발표회 논문집, v., no., pp.365 - 368 | - |
dc.identifier.uri | http://hdl.handle.net/10203/118555 | - |
dc.language | KOR | - |
dc.title | Supervisory Control of Plasma etching Systems Improving Reliability Under Partial Observation | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 365 | - |
dc.citation.endingpage | 368 | - |
dc.citation.publicationname | 제어계측, 로보틱스 및 자동화 연구회 합동 학술 발표회 논문집 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | Lim Jong-Tae | - |
dc.contributor.localauthor | Cho, Kwang-Hyun | - |
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