Annealing and oxidation of silicon oxide films prepared by plasma-enhanced chemical vapor deposition

We have investigated phase separation, silicon nanocrystal (Si NC) formation and optical properties of Si oxide (SiOx, 0
Publisher
AMER INST PHYSICS
Issue Date
2005-01
Language
ENG
Keywords

VISIBLE-LIGHT EMISSION; SI NANOCRYSTALS; OPTICAL-PROPERTIES; POROUS SILICON; LASER-ABLATION; THIN-FILMS; BLUE PHOTOLUMINESCENCE; LUMINESCENCE; PARTICLES; NANOSTRUCTURES

Citation

JOURNAL OF APPLIED PHYSICS, v.97, no.1

ISSN
0021-8979
DOI
10.1063/1.1829789
URI
http://hdl.handle.net/10203/1181
Appears in Collection
EE-Journal Papers(저널논문)
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