Analysis and Characterization of Laterally Induced Electrostatic Repulsive Forces

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Issue Date
1998-04-06
Language
ENG
Citation

Inter. Conf. on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, pp.218 - 221

URI
http://hdl.handle.net/10203/118002
Appears in Collection
BiS-Conference Papers(학술회의논문)
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