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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

Electrostatic quality factor control for surface-micromachined lateral resonators

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Lee, Ki Bang / Cho, Young-Horesearcher
Issue Date
1996-10-02
Language
ENG
Citation

Proceedings of the 1996 7th International Symposium on Micro Machine and Human Science, MHS'96, pp.143 - 147

URI
http://hdl.handle.net/10203/117916
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BiS-Conference Papers(학술회의논문)
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