Novel Fabrication of Electroplated 3D Micro-Coils Using 3D Photolithography of Thick Photoresist

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Publisher
The Korean Institute of Telematics and Electronics
Issue Date
1998-07
Language
ENG
Citation

International Microprocesses and Nanotechnology Conference, pp.85 - 86

URI
http://hdl.handle.net/10203/117136
Appears in Collection
EE-Conference Papers(학술회의논문)
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