Multilevel microstructure fabrication using single-step 3D photolithography and single-step electroplating

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Publisher
SPIE
Issue Date
1998-09-21
Language
English
Citation

Proceedings of the 1998 Conference on Materials and Device Characterization in Micromachining, pp.358 - 366

URI
http://hdl.handle.net/10203/116901
Appears in Collection
EE-Conference Papers(학술회의논문)RIMS Conference Papers
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