High-Performance Electroplated Solenoid-Type Integrated Inductor (SI2) for RF Applications Using Simple 3D Surface Micromachining Technology
- Publisher
- IEDM
- Issue Date
- 1998-12
- Language
- English
- Citation
IEDM, pp.6 - 9
- Appears in Collection
- RIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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