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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

ECR plasma enhanced multi-target sputtering 법을 이용한 Pb(Zr,Ti)O3 박막의 제조 및 특성 평가

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이원종researcher / 김성태 / 김현호
Issue Date
1996-01-01
Language
KOR
Citation

한국재료학회 추계학술연구발표회 1996, pp.0 - 0

URI
http://hdl.handle.net/10203/116653
Appears in Collection
MS-Conference Papers(학술회의논문)
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