ECR enhanced multi-target sputtering 방법으로 제조한 PLT박막의 특성

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Issue Date
1995-01-01
Language
KOR
Citation

한국재료학회 추계학술발표, pp.0 - 0

URI
http://hdl.handle.net/10203/116647
Appears in Collection
MS-Conference Papers(학술회의논문)
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