Extraction of elastic parameters of heavily boron-doped silicon layer by elimination of misfit dislocations
- Issue Date
- 1995-04-17
- Language
- ENG
- Citation
Proceedings of the 1995 MRS Spring Meeting, v.378, pp.129 - 134
- ISSN
- 0272-9172
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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