O2/CF4 ECR 플라즈마를 이용한 RuO2박막의 건식식각 기구 연구

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Issue Date
1996-01-01
Language
KOR
Citation

한국재료학회 추계학술연구발표회, pp.0 - 0

URI
http://hdl.handle.net/10203/116568
Appears in Collection
MS-Conference Papers(학술회의논문)
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