A Batch-fabricated Piezoresistive Cantilever Microaccelerometers with a Symmetrically Bonded Proof-mass

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 312
  • Download : 0
Issue Date
1997-12
Language
ENG
Citation

IMEMS 1997, pp.6 - 9

URI
http://hdl.handle.net/10203/116528
Appears in Collection
BiS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0