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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

A Batch-fabricated Piezoresistive Cantilever Microaccelerometers with a Symmetrically Bonded Proof-mass

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Ko, JS / Cho, Young-Horesearcher / Lee, HJ / Park, K
Issue Date
1997-12
Language
ENG
Citation

IMEMS 1997, pp.6 - 9

URI
http://hdl.handle.net/10203/116528
Appears in Collection
BiS-Conference Papers(학술회의논문)
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