접합 대칭 질량형 실리콘 미소가속도계
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 고종수 | - |
| dc.contributor.author | 조영호 | - |
| dc.contributor.author | 곽병만 | - |
| dc.contributor.author | 이호준 | - |
| dc.contributor.author | 박관흠 | - |
| dc.date.accessioned | 2013-03-15T04:10:45Z | - |
| dc.date.available | 2013-03-15T04:10:45Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997-04-26 | - |
| dc.identifier.citation | 대한전기학회 MEMS연구회 학술발표회, v., no., pp.311 - 319 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/116271 | - |
| dc.language | KOR | - |
| dc.title | 접합 대칭 질량형 실리콘 미소가속도계 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 311 | - |
| dc.citation.endingpage | 319 | - |
| dc.citation.publicationname | 대한전기학회 MEMS연구회 학술발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 조영호 | - |
| dc.contributor.nonIdAuthor | 고종수 | - |
| dc.contributor.nonIdAuthor | 곽병만 | - |
| dc.contributor.nonIdAuthor | 이호준 | - |
| dc.contributor.nonIdAuthor | 박관흠 | - |
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- BiS-Conference Papers(학술회의논문)
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