Effects of ECR N2O-plasma nitridation on thermal oxide characteristics

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 190
  • Download : 0
Issue Date
1995-04-17
Language
ENG
Citation

Proceedings of the 1995 MRS Spring Meeting, v.391, pp.143 - 148

ISSN
0272-9172
URI
http://hdl.handle.net/10203/115788
Appears in Collection
RIMS Conference Papers
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0