정전 반발력을 이용한 수평구동형 미소정전 액추에이터

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Issue Date
1997-04-26
Language
KOR
Citation

대한전기학회 MEMS연구회 학술발표회, pp.167 - 176

URI
http://hdl.handle.net/10203/115704
Appears in Collection
BiS-Conference Papers(학술회의논문)
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