DSpace at KOASAS: Fabrication of a single crystal silicon substrate for AM-LCD using vertical etching of (110) silicon

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Fabrication of a single crystal silicon substrate for AM-LCD using vertical etching of (110) silicon

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Yoon Jun-Bo / Lee Ho-Jun / Han Chul-Hi researcher / Kim, Choong Ki

Issue Date: 1995-04-18

Language: ENG

Citation: Proceedings of the 1995 MRS Spring Meeting, v.377, pp.859 - 864

ISSN: 0272-9172

URI: http://hdl.handle.net/10203/115454

Appears in Collection: EE-Conference Papers(학술회의논문)

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