Geometric Constraints on Planar Microstructures and their Influence on the Dynamics of Resonant Microactuators

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Issue Date
1994-06-22
Language
ENG
Citation

Int. ISEM Symposium on Advanced Computational and Design Techniques in Applied Electromagnetic Systems, pp.301 - 304

URI
http://hdl.handle.net/10203/115099
Appears in Collection
BiS-Conference Papers(학술회의논문)
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