Buried Storage Capacitor under the Access Transistor(BUT) Cell for ULSI using Wafer Bonding Technology
- Issue Date
- 1991
- Language
- KOR
- Citation
한국전자공학회, 한/미 마이크로일렉트로닉스 공동 워크샵
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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