DSpace at KOASAS: The Control of Polysilicon/Silicon Interface Processed by Rapid Thermal Anneal

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

The Control of Polysilicon/Silicon Interface Processed by Rapid Thermal Anneal

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Jeon, Duk Young researcher / Liu, TM / Kim, YO / Lee, KF / Ourmazd, A

Issue Date: 1991

Language: ENG

Citation: Proceedings of 1991 IEEE Bipolar Circuit & Technology Meeting, pp.263 - 266

URI: http://hdl.handle.net/10203/111175

Appears in Collection: MS-Conference Papers(학술회의논문)

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