The Effect of Reaction Condition on the Crystallographic Orientation and Surface Morphology of Chemical Vapor Deposited Al2O3
- Issue Date
- 1983-05
- Language
- English
- Citation
Proc. EURO CVD 4, Chemical Vapor Deposition , pp.410
- Appears in Collection
- RIMS Conference PapersRIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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