Effects if Lattice Damages on Impurity Depth Profiles in BF2+ Ion Implanted Silicon
- Publisher
- International Conference on Thin Films & International Conference on Metallurgical Coatings
- Issue Date
- 1990-04
- Language
- English
- Citation
8th Int. Conf. on Thin Films, Metallurgical Coatings
- Appears in Collection
- RIMS Conference PapersRIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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