Wafer temperature simulation and control algorithm in RTA systemWafer temperature simulation and control algorithm in RTA system
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조병진 | - |
| dc.contributor.author | Kim, KT | - |
| dc.contributor.author | Kim, CK | - |
| dc.date.accessioned | 2013-03-14T12:10:49Z | - |
| dc.date.available | 2013-03-14T12:10:49Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1987-05-12 | - |
| dc.identifier.citation | Conf. on CAD, Semiconductor Material and Components, v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/108539 | - |
| dc.language | KOR | - |
| dc.title | Wafer temperature simulation and control algorithm in RTA system | - |
| dc.title.alternative | Wafer temperature simulation and control algorithm in RTA system | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | Conf. on CAD, Semiconductor Material and Components | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 조병진 | - |
| dc.contributor.nonIdAuthor | Kim, KT | - |
| dc.contributor.nonIdAuthor | Kim, CK | - |
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