Crystallization dynamics of ferroelectric PZT(52/48) thin film prepared by reactive cosputtering on Pt on Si(100)
- Issue Date
- 1993-11-29
- Language
- ENG
- Citation
Proceedings of the 1993 Fall Meeting of the Materials Research Society, v.321, pp.597 - 602
- ISSN
- 0272-9172
- Appears in Collection
- NE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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