반도체 미세가공용 Photoresist의 연구방향
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김진백 | - |
| dc.date.accessioned | 2013-03-14T11:12:16Z | - |
| dc.date.available | 2013-03-14T11:12:16Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1989-04 | - |
| dc.identifier.citation | 한국고분자학회 1989년도 춘계 학술대회, v., no., pp.20 - 21 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/108089 | - |
| dc.language | KOR | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | 반도체 미세가공용 Photoresist의 연구방향 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 20 | - |
| dc.citation.endingpage | 21 | - |
| dc.citation.publicationname | 한국고분자학회 1989년도 춘계 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김진백 | - |
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- CH-Conference Papers(학술회의논문)
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