Preparation and Microstructural Characterization of Ferroelectric Thin Film PbTiO3 on Si, MgO and Sapphire by Multi-target Co-sputtering

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Issue Date
1992-12-01
Language
ENG
Citation

MRS Proc., pp.197 - 202

URI
http://hdl.handle.net/10203/107641
Appears in Collection
MS-Conference Papers(학술회의논문)
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