Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

As an extension of the authors' previous report of Ref 1, we describe an improved version of dispersive white- light interferometry that enables us to measure the tomographical thickness profile of a thin- film layer through Fourier- transform analysis of spectrally- resolved interference signals. The group refractive index can also be determined without prior knowledge of the geometrical thickness of the film layer. Owing to fast measurement speed with no need of mechanical depth scanning, the proposed method is well suited for in- line 3- D inspection of dielectric thinfilm layers particularly for the semiconductor and flat- panel display industry. (c) 2006 Optical Society of America.
Publisher
Optical Soc Amer
Issue Date
2006-11
Language
ENG
Keywords

ABSOLUTE DISTANCE MEASUREMENT; ACOUSTOOPTIC TUNABLE FILTER; PROFILOMETRY

Citation

OPTICS EXPRESS, v.14, no.24, pp.11885 - 11891

ISSN
1094-4087
DOI
10.1364/OE.14.011885
URI
http://hdl.handle.net/10203/1074
Appears in Collection
ME-Journal Papers(저널논문)
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