Nucleation and Growth of Al2O3 on Si in the CVD Processes
- Issue Date
- 1984-05
- Language
- English
- Citation
The 9th Int'l Conf. on Chemical Vapor Deposition, The Electrochemical Soc., pp.233
- Appears in Collection
- RIMS Conference PapersRIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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