A simple and novel method for the evaluation of adhesion properties between UV curable resin and stamp in UV-nanoimprint lithography (UV-NIL)

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In ultraviolet nanoimprint lithography (UV-NIL), adhesion between the UV curable resin and the stamp is one of the most significant factors affecting successful pattern transfer. Therefore, the adhesion properties of UV curable resins used in UV-NIL must be properly understood. In this study, a simple and novel method is proposed for evaluating the adhesion properties of UV curable resin, using a specially-designed adhesion tester. Using this method, the pull-off tests between a stamp and a UV curable resin for UV-NIL was conducted, and the effects of UV-NIL process conditions on adhesion properties were investigated. PAK-01 was used as the UV curable resin for UV-NIL and a counterpart was a fused silica lens as the stamp. The pull-off forces between the PAK-01 and the lens were measured for various hold times, pulling force rates and relative humidities, and the effects of these process conditions on the pull-off force were examined. The pulling force rate and the relative humidity were found to have a strong influence on the pull-off force. The pull-off force increased as the pulling force rate increased, but decreased as the relative humidity increased. In contrast, the effect of hold time on the pull-off force was insignificant. (C) 2012 Elsevier B.V. All rights reserved.
Publisher
ELSEVIER SCIENCE BV
Issue Date
2012-10
Language
English
Article Type
Article
Keywords

FLASH IMPRINT LITHOGRAPHY; FORCE; RELEASE; STEP; MOLD; DEFORMATION; MECHANICS; STRENGTH; CONTACT; IMPACT

Citation

MICROELECTRONIC ENGINEERING, v.98, pp.64 - 69

ISSN
0167-9317
DOI
10.1016/j.mee.2012.05.007
URI
http://hdl.handle.net/10203/103483
Appears in Collection
ME-Journal Papers(저널논문)
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