DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Jong Kyung | ko |
dc.contributor.author | Lee, Seok-Hee | ko |
dc.contributor.author | Oh, Jae Sub | ko |
dc.contributor.author | Lee, Ki-Hong | ko |
dc.contributor.author | Pyi, Seung Ho | ko |
dc.contributor.author | Cho, Byung Jin | ko |
dc.date.accessioned | 2013-03-12T16:58:38Z | - |
dc.date.available | 2013-03-12T16:58:38Z | - |
dc.date.created | 2012-09-27 | - |
dc.date.created | 2012-09-27 | - |
dc.date.issued | 2012-08 | - |
dc.identifier.citation | APPLIED PHYSICS EXPRESS, v.5, no.8 | - |
dc.identifier.issn | 1882-0778 | - |
dc.identifier.uri | http://hdl.handle.net/10203/102936 | - |
dc.description.abstract | It is demonstrated that the dielectric constant of Al2O3 is significantly increased through the addition of a very small amount of La into Al2O3 followed by a high-temperature post-deposition annealing (PDA). The retention property and reliability of the charge trap flash memory devices fabricated through the proposed method are greatly improved due to the increased kappa-value of the Al2O3 blocking oxide with no sacrifice of the bandgap, as well as a reduced low-field leakage component and improved dielectric relaxation effect. (c) 2012 The Japan Society of Applied Physics | - |
dc.language | English | - |
dc.publisher | JAPAN SOC APPLIED PHYSICS | - |
dc.subject | HIGH-K DIELECTRICS | - |
dc.subject | AL2O3 | - |
dc.subject | GAP | - |
dc.title | Improvement of Charge Retention in Flash Memory Devices by Very Light Doping of Lanthanum into an Aluminum-Oxide Blocking Layer | - |
dc.type | Article | - |
dc.identifier.wosid | 000307381500002 | - |
dc.identifier.scopusid | 2-s2.0-84865344003 | - |
dc.type.rims | ART | - |
dc.citation.volume | 5 | - |
dc.citation.issue | 8 | - |
dc.citation.publicationname | APPLIED PHYSICS EXPRESS | - |
dc.identifier.doi | 10.1143/APEX.5.081102 | - |
dc.contributor.localauthor | Lee, Seok-Hee | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | Oh, Jae Sub | - |
dc.contributor.nonIdAuthor | Lee, Ki-Hong | - |
dc.contributor.nonIdAuthor | Pyi, Seung Ho | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | HIGH-K DIELECTRICS | - |
dc.subject.keywordPlus | AL2O3 | - |
dc.subject.keywordPlus | GAP | - |
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