Browse by Subject ion implantation

Showing results 4 to 6 of 6

4
Fabrication of excimer laser annealed poly-Si thin film transistor by using an elevated temperature ion shower doping

Park, SC; Jeon, DukYoung, THIN SOLID FILMS, v.310, no.1-2, pp.317 - 321, 1997-11

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Infrared Radiative Properties of Heavily Doped Silicon at Room Temperature

Basu, S.; Lee, Bong Jae; Zhang, Z. M., JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, v.132, no.2, 2010-02

6
Initial stage of nitridation on Si(100) surface using low-energy nitrogen ion implantation

Kim K.-j.; Kang T.-H.; Ihm K.; Jeon C.; Hwang C.-C.; Kim B., SURFACE SCIENCE, v.600, no.17, pp.3496 - 3501, 2006

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