Browse by Subject virtual metrology

Showing results 1 to 3 of 3

1
A robust support vector regression with a linear-log concave loss function

Kim, Dohyun; Lee, Chungmok; Hwang, Sangheum; Jeong, Myong K., JOURNAL OF THE OPERATIONAL RESEARCH SOCIETY, v.67, no.5, pp.735 - 742, 2016-05

2
Robust Relevance Vector Machine with Variational Inference for Improving Virtual Metrology Accuracy

Hwang, Sangheum; Jeong, Myong K.; Yum, Bong-Jinresearcher, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.27, no.1, pp.83 - 94, 2014-02

3
유전알고리즘과 커널 부분최소제곱회귀를 이용한 반도체 공정의 가상계측 모델 개발

김보건; 염봉진researcher, 산업공학(IE INTERFACES), v.23, no.3, pp.229 - 238, 2010-09

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