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Characteristics of tunneling nitride grown by electron cyclotron resonance nitrogen-plasma nitridation and its application to low-voltage electrical erasable-programmable read-only memory Min, KS; Chung, JY; Lee, Kwyro, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.4B, pp.2963 - 2968, 2001-04 |
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