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Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage Khim, Gyungho; Park, Chun-Hong; Lee, Husang; Kim, Seung-Woo, VACUUM, v.81, no.4, pp.466 - 474, 2006-11 |
Study on low-outgassing resists = 저가스 발생형 레지스트에 대한 연구link Shin, Han-Gyeol; 신한결; et al, 한국과학기술원, 2014 |
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