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Showing results 1 to 5 of 5

1
Design and tolerancing of ArF excimer laser optics for lithography

Chung, HB; Lee, KH; Kim, DH; Yoo, Hyung Joun, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.30, no.3, pp.534 - 539, 1997-06

2
Display glass cutting by femtosecond laser induced single shot periodic void array

Ahmed, F; Lee, Man Seop; Sekita, H; Sumiyoshi, T; Kamata, M, APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.93, pp.189 - 192, 2008-10

3
Evaluating Mechanical Properties of 100nm-Thick Atomic Layer Deposited Al2o3 as a Free-Standing Film

Koo, Junmo; Lee, Sangmin; Kim, Junmo; Kim, Dong Hwan; Choi, Byoung-Ho; Kim, Taek-Soo; Shim, Joon Hyung, SCRIPTA MATERIALIA, v.187, pp.256 - 261, 2020-10

4
Formation of Periodic Micro/nano-holes Array in Boro-aluminosilicate Glass by Single-pulse Femtosecond Laser Machining

Ahsan, Md Shamim; Kwon, Yoon-Young; Sohn, Ik-Bu; Noh, Young-Chul; Lee, Man Seop, JOURNAL OF LASER MICRO NANOENGINEERING, v.9, no.1, 2014-03

5
Rational Control of Diffraction and Interference from Conformal Phase Gratings: Toward High-Resolution 3D Nanopatterning

Hyun, Jerome K.; Park, Junyong; Kim, Eunhye; Lauhon, Lincoln J.; Jeon, Seok-Woo, ADVANCED OPTICAL MATERIALS, v.2, no.12, pp.1213 - 1220, 2014-12

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