Browse by Subject E-beam lithography

Showing results 1 to 3 of 3

1
A Nano-Structure Memory with SOI Edge Channel and a Nano Dot

geunsook park; sangyeon han; taekeun hwang; hyungcheol shinresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS, v.37, no.12B, pp.7190 - 7192, 1998-12

2
Lateral Silicon Field-Emission Devices Using Electron Beam Lithography

sangyeon han; sun-a yang; taekeun hwang; jongho lee; jong duk lee; hyungcheol shinresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1, v.39, no.5A, pp.2556 - 2559, 2000-05

3
전자선 묘화와 반응성 이온 식각을 이용한 나노구조형성 및 나노구조의 기억소자 제작 = Formation of nano-structure and fabrication of nano-structure memory using E-beam lithography and reactive ion etchinglink

박근숙; Park, Geun-Sook; et al, 한국과학기술원, 1998

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