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Atomic force microscope probe tips using heavily boron-doped silicon cantilevers realized in a (110) bulk silicon wafer

Cho, Il-Joo; Park, Eun-Chul; Hong, Songcheolresearcher; Yoon, Euisik, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.39, no.12B, pp.7103 - 7107, 2000-12

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